METHOD FOR MAKING A CAVITY IN THE BODY OF A SUBSTRATE CAPABLE OF FORMING A SITE FOR RECEIVING A COMPONENT

摘要

The invention relates to a method for manufacturing a micro-device provided with at least one site for receiving components, formed in the body of a substrate (100, 200), said method including the steps of: a) making, in at least one first substrate (100) adhered to a second substrate (200) by means of a discontinuous gluing interface, at least one first cut (105) around at least one sacrificial block (107) of the first substrate (100), by engraving the first substrate (100) so as to expose said gluing interface; b) removing said sacrificial block (107) so as to make at least one first cavity in the first substrate (100).