| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can have a fine junction region joined with low resistance by reducing the heating value needed for metal fusion joining, and can have a resistance value freely set by controlling the cross section area of a voltage application path. <P>SOLUTION: A piezoelectric element member 12, having a plurality of piezoelectric element columns formed, is joined on a base member 13, a low thermally conductive layer 51 with thermally conductivity lower than the base member 13, and an electrically conductive layer 52 are laminated on a region other than the junction region to the piezoelectric element member 12 of the base member 13, and a part of the electrically conductive layer 52 is fused to be joined to a common electrode 24 and a common electrode portion of the piezoelectric element member 12. <P>COPYRIGHT: (C)2011,JPO&INPIT |
