| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal display panel and a method of manufacturing the same, securing moisture resistance of a top gate type TFT while using an insulating film much thinner than the conventional protective insulating film as an insulating film covering the surface of metal wiring, the surface of which is formed of Mo. SOLUTION: In the liquid crystal display panel 1, the surface of a signal line 16 is formed of Mo, the surface of the signal line 16 is coated with an insulating film 19 having a thickness from 0.005 to 0.02μm, and formed of silicon nitride, and further the surface of the insulating film 19 is coated with an interlayer resin film 20. A pixel electrode 21 and a drain electrode D of a TFT are electrically connected to each other through a contact hole 22, and a second opening 19a is formed simultaneously with cleaning in a cleaning process using a solution of hydrofluoric acid before the pixel electrode is formed. COPYRIGHT: (C)2011,JPO&INPIT
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