| 摘要 |
PROBLEM TO BE SOLVED: To provide an LSI tester which implements a measurement by switching old and new system software versions. SOLUTION: The LSI tester includes: a system software storing section 33 for storing the old and new versions of the system software; a calibration data storing section 34 for storing calibration data by the versions of the system software; a test program storing section 44 for storing a test program corresponding to a DUT; a data set system version correspondence table 35 for bringing the test program to correspond to the system version; and an interface for choosing a desired test program from the test program storing section, choosing a system version which corresponds to the chosen test program, from the data set system version correspondence table, reading prescribed calibration data by-version calibration data storing section, and driving the test system. COPYRIGHT: (C)2011,JPO&INPIT
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