| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump in which cracks are unlikely to be produced on a piezoelectric body layer of a piezoelectric vibrator, in a piezoelectric pump in which a pump chamber and an atmosphere chamber are formed on front and rear of the piezoelectric vibrator kept liquidtight at its peripheral edge, and a pumping action is attained by causing the piezoelectric vibrator to vibrate. SOLUTION: A piezoelectric pump in which a piezoelectric vibrator having an alternately laminated structure composed of at least one piece of shim constituted by a conductive metal sheet and at least one piezoelectric body layer is arranged such that the shim is located nearest to the air chamber side. COPYRIGHT: (C)2011,JPO&INPIT
|
