发明名称 Vorrichtung zum zweidimensionalen Aufbau von Partikeln
摘要 A method and apparatus (10) for making thin layers from particles, wherein the particles are deposited on a carrier fluid flowing by gravity along a ramp (12) leading to a dam (18). The particles are held back at the bottom of the ramp (12), thereby causing the particles to be piled up one against the other in a monolayer configuration.
申请公布号 DE60334251(D1) 申请公布日期 2010.10.28
申请号 DE2003634251 申请日期 2003.05.12
申请人 NANOMETRIX INC. 发明人 PICARD, GILLES;SCHNEIDER, JUAN
分类号 B05D1/20;B05D1/30;B01D69/12;B05C3/18;B05D1/00;B05D7/00;G11B5/842;H01L21/28;H01L23/498;H01L29/51 主分类号 B05D1/20
代理机构 代理人
主权项
地址