| 摘要 |
PROBLEM TO BE SOLVED: To provide an anti-static treated work stage, and more particularly, a work stage on which a flat work such as a substrate is mounted, in which the work stage can protect the work from static electricity and can be anti-static treated. SOLUTION: In the anti-static treated work stage, a carbon nanotube coating film is coated on a surface to which the substrate of the work stage is mounted. The surface resistance of the carbon nanotube coating film is 105Ω/sq to 109Ω/sq. COPYRIGHT: (C)2011,JPO&INPIT |
