| 摘要 |
PROBLEM TO BE SOLVED: To form a structure of a mirror element for eliminating mirror surface distortion due to the position of attaching a support jig and stably assembling an optical system by establishing such a structure that the mirror support jig of the mirror element is easily attached. SOLUTION: The mirror element includes a plurality of recessed holes 6 recessed from the surface on the opposite side of a mirror surface toward the mirror surface, at least one recessed hole 62 of the plurality of recessed holes 6 is disposed at an interval equal to or more than a prescribed interval with the adjacent recessed hole 65, a plane 64 is formed between the recessed hole 62 and the recessed hole 65, and a support jig is attached to the plane 64. Further, a bored hole 13b bored from the hole side face 6P of the recessed hole 62 to the hole side face 6R of the adjacent recessed hole 65 is included, and a rib structure 3 is made light in weight. By forming a plane to attach the support jig at a farthest part from the mirror surface, the mirror element of a structure for not easily generating mirror surface distortion by the attachment of the support jig is formed. COPYRIGHT: (C)2011,JPO&INPIT
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