| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope suitable for observing irregularities of a sample surface by reducing illumination unevenness on the sample surface in oblique illumination. SOLUTION: The microscope includes: an objective lens 5 arranged to face a sample 1001; an oblique illumination means 8 including a light source 6 irradiating the sample 1001 with illumination light from an oblique direction with respect to an optical axis between the sample 1001 and the objective lens 5; and an observation means 4 observing the image of the sample 1001 taken in through the objective lens 5. Further, the microscope includes a light diffusing member 1005 provided in an optical path between the light source 6 and the sample 1001. The light diffusing member 1005 is provided so that a distance from the light source 6 to a diffusing surface is longer as a distance from the light source 6 to the sample 1001 is longer. COPYRIGHT: (C)2011,JPO&INPIT
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