发明名称 METHOD FOR DETECTING CUTTING BLADE TIP SHAPE
摘要 PROBLEM TO BE SOLVED: To provide a method for detecting a cutting blade tip shape for detecting the tip shape of the cutting blade efficiently and determining whether the cutting blade must be replaced or not. SOLUTION: This method for detecting the cutting blade tip shape for detecting the tip shape of the cutting blade like a disc for cutting a workpiece by biting it while rotating, comprises a step for forming a detection groove having at least one end being dead end by cutting a part of the workpiece by the cutting blade, an imaging step for imaging the one end of the detection groove by an imaging means to obtain an imaged image, and a detection step for detecting the tip shape of the cutting blade from the imaged image. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010240776(A) 申请公布日期 2010.10.28
申请号 JP20090091912 申请日期 2009.04.06
申请人 DISCO ABRASIVE SYST LTD 发明人 UCHIDA FUMIO
分类号 B24B53/00;H01L21/301 主分类号 B24B53/00
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