| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a table with transmissive lighting capable of positioning a substrate by transmissive lighting and machining the substrate by making a machining tool press against. <P>SOLUTION: The table including transmissive lighting includes: an infrared light source; a metal sub-table, where a movable mechanism is mounted to a lower portion and a table placement surface for placing a top table is formed at an upper portion; and the top table that includes a bottom face brought into face contact with the table placement surface of the sub-table, an upper surface for placing a substrate, and the incidence side surface for allowing infrared light of the infrared light source to enter, and is made of an infrared transmissive material. A reflection surface for reflecting the infrared light entering from the incidence side surface toward an upper surface is provided inside the top table, and at a lower portion of a position for placing the substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT |
