| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium which is adaptable to higher-density recording by improving the density of a soft magnetic base layer and reducing surface roughness. SOLUTION: The method manufactures the magnetic recording medium wherein the soft magnetic base layer 2 obtained by subjecting a plurality of soft magnetic layers 2a to antiferromagnetic coupling and a perpendicular magnetic layer 4 having an easy magnetization axis oriented mainly vertically to a nonmagnetic substrate 1 are laminated on at least the nonmagnetic substrate 1. The method forms the soft magnetic layers 2a by a sputtering method and uses Kr or Xe as a sputtering gas, which has a pressure of≤0.3 Pa. This attains the generation of high-energy sputtering particles and also reduces gas particles mixed into a film, thereby forming the soft magnetic base layer 2 which is high in density, precise, and high in flatness. COPYRIGHT: (C)2011,JPO&INPIT
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