发明名称 METHOD OF REFORMING A METAL PATTERN, ARRAY SUBSTRATE, AND METHOD OF MANUFACTURING THE ARRAY SUBSTRATE
摘要 A method of reforming a metal pattern for improving the productivity and reliability of a manufacturing process, an array substrate and a method of manufacturing the array substrate are disclosed. In the method, a first wiring pattern is formed on an insulation substrate. The first wiring pattern is removed. A second wiring pattern is formed on an embossed pattern by using the embossed pattern as an alignment mask. The embossed pattern is defined by a recess formed on a surface of the insulation substrate. Accordingly, the insulation substrate having the recess formed thereon may not be discarded, and may be reused in forming the first wiring pattern. In addition, the embossed pattern defined by the recess is used as an alignment mask, so that the alignment reliability of a metal pattern may be improved.
申请公布号 US2010270554(A1) 申请公布日期 2010.10.28
申请号 US20090625096 申请日期 2009.11.24
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HONG SUN-YOUNG;PARK HONG-SICK;KIM SHI-YUL;KIM BONG-KYUN;CHOI YOUNG-JOO;LEE BYEONG-JIN;CHOUNG JONG-HYUN;YANG DONG-JU;JUNG HYUN-YOUNG
分类号 H01L29/10;B44C1/22;H01L21/4763 主分类号 H01L29/10
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