发明名称 METHOD FOR MANUFACTURING CO-BASE SINTERED ALLOY SPUTTERING TARGET FOR FORMATION OF MAGNETIC RECORDING FILM WHICH IS LESS LIKELY TO GENERATE PARTRICLES, AND CO-BASE SINTERED ALLOY SPUTTERING TARGET FOR FORMATION OF MAGNETIC RECORDING FILM
摘要 A method for manufacturing a Co-base sintered alloy sputtering target for the formation of a magnetic recording film including providing a Cr—Co alloy powder consisting of 50 to 70 atomic % of Cr and remaining Co, a Pt powder, a non-magnetic oxide powder, and a Co powder, blending and mixing the powders together so as to give the chemical composition consisting of 2 to 15 mol % of a non-magnetic oxide, 3 to 20 mol % of Cr, and 5 to 30 mol % of Pt and a remainder containing Co, and sintering the mixture under pressure. Or alternatively providing a Pt—Cr binary alloy powder consisting of 10 to 90 atomic % of Pt and remaining Cr, a Pt powder, a non-magnetic oxide powder, and a Co powder, blending and mixing the powders so as to give the chemical composition above, and then sintering the mixture under pressure.
申请公布号 US2010270146(A1) 申请公布日期 2010.10.28
申请号 US20070294691 申请日期 2007.03.30
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 NONAKA SOHEI;SHIRAI YOSHINORI;SUGIUCHI YUKIYA
分类号 C23C14/34;B22F3/12;B22F3/15 主分类号 C23C14/34
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