发明名称 |
SAMPLE HOLDER, METHOD FOR USE OF THE SAMPLE HOLDER, AND CHARGED PARTICLE DEVICE |
摘要 |
<p>A sample holder for efficiently performing the processing or observation of a sample by means of charged particles while cooling. Particularly, disclosed is a sample holder whereby the processing or observation of a material which may be affected by the influence of heat damage can be performed in a state in which the material is cooled, and furthermore, the influence due to a sample processing method using charged particles can be reduced by cooling. The sample holder is provided with a sample stage capable of fixing a sample piece extracted from a sample by ion beam irradiation, and a rotation mechanism for rotating the sample stage in a desired direction, which can be attached to an ion beam device and a transmission electron microscope device, and which has a movable heat transfer material for thermally connecting the sample stage and a cooling source, and an isolation material for thermally isolating the sample stage and the heat transfer material from the outside. According to the sample holder, the processing or observation of a sample by means of charged particle beams can be performed while efficiently cooling.</p> |
申请公布号 |
WO2010122717(A1) |
申请公布日期 |
2010.10.28 |
申请号 |
WO2010JP02525 |
申请日期 |
2010.04.07 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION;NAGAKUBO, YASUHIRA;TANIGAKI, TOSHIAKI;ITO, KATSUJI |
发明人 |
NAGAKUBO, YASUHIRA;TANIGAKI, TOSHIAKI;ITO, KATSUJI |
分类号 |
H01J37/20;G01N1/28;H01J37/317 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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