METHOD OF MANUFACTURING ELEMENT WITH NANO GAP ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an element with nano gap electrodes, readily achieving mass production of elements constant in distance between the nano gap electrodes.

SOLUTION: The method of manufacturing the element 1 with the nano gap electrodes includes: a first electrode-forming step of forming a first electrode 20; a spacer-forming step of forming a spacer 30 on an upper surface of the first electrode 20; a second electrode-forming step of forming a second electrode 60 in contact with an upper surface of the spacer 30; and a spacer removing step of removing the spacer 30 to form a gap 70.

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