| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device that saves the space for a probe device and prevents a tester for testing a wafer from decreasing in availability. SOLUTION: The semiconductor inspection device includes a cassette 7 where a lot box 2 containing a plurality of wafers 1 is set, a wafer transfer section for transferring the wafers from the lot box 2 to a water test section, and a wafer buffer 8 for storing a predetermined wafer of the plurality of wafers between the cassette 7 and water test section. COPYRIGHT: (C)2011,JPO&INPIT
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