| 摘要 |
PROBLEM TO BE SOLVED: To determine the generation of a missing pulse quickly, and to prevent the erroneous determination of the generation of the missing pulse at the timing of the opening and closing of a shutter. SOLUTION: There is provided a laser annealing device for determining that there is a missing pulse when a beam sensor signal c of a threshold value r or larger is not detected in a predetermined period G from the rise of a shutter opening signal b. When n is a natural number and α is maximum deviation time of the open timing of a shutter, n×T+α<G<(n+1)×T-α is satisfied. When an n missing pulse is generated, the generation of the missing pulse is quickly determined. The erroneous determination of the generation of the missing pulse at the timing of the opening and closing of the shutter does not occur. COPYRIGHT: (C)2011,JPO&INPIT
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