发明名称 LASER MACHINING METHOD
摘要 The laser beam (L) is irradiated along an intended cutting line (5a) onto a convergence point within an object (a) to be machined to form an affected area (7a). After that, the laser beam (L) is irradiated again along the intended cutting line (5a) to form an affected area (7b) between a surface (3) of the object (1) to be machined and the first affected area (7a) and produce a crack (Cb) extending from the affected area (7b) to the surface (3). Therefore, it is possible to release and cancel a deflecting force (F1) which is produced when the affected area (7a) is formed in the object (1) to be machined by the crack (Cb). As a result, the occurrence of the deflection of the object (1) to be machined can be prevented.
申请公布号 WO2010122866(A1) 申请公布日期 2010.10.28
申请号 WO2010JP54841 申请日期 2010.03.19
申请人 HAMAMATSU PHOTONICS K.K.;SUGIURA RYUJI 发明人 SUGIURA RYUJI
分类号 B23K26/38;B23K26/04;H01L21/301 主分类号 B23K26/38
代理机构 代理人
主权项
地址