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发明名称
Apparatus and method for transferring a pattern
摘要
申请公布号
EP1605308(B1)
申请公布日期
2010.10.27
申请号
EP20050012232
申请日期
2005.06.07
申请人
CANON KABUSHIKI KAISHA
发明人
KAWAKAMI, EIGO;OTA, HIROHISA;NAKAMURA, TAKASHI;KASUMI, KAZUYUKI;TOKITA, TOSHINOBU
分类号
G03F7/00;G03F7/20;H01L21/027
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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