发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing homogeneous silica-titania glass in which there is no striae at least in one direction and the concentrations of components of silica-titania are uniform over whole member; and homogeneous silica-titania glass in which there is no striae at least in one direction or in three directions and the concentrations of the components are uniform over whole member. <P>SOLUTION: The method for manufacturing the silica-titania glass includes; a preparing process for preparing a columnar silica-titania glass body by introducing a silica raw material and a titania raw material into an oxyhydrogen flame, then depositing/growing silica-titania glass fine particles on a rotating base material in the vertical direction to prepare a porous glass body, and transparentizing the porous glass body by heating it; a cutting-out process for cutting the silica-titania glass body in the growth axis direction along radius to form rod-like glass bodies; and a first homogenizing process for performing a homogenization treatment to remove striae by applying a zone melting method so that shearing stress acts in a direction perpendicular to the growth axis of the glass body. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP4568219(B2) 申请公布日期 2010.10.27
申请号 JP20050362987 申请日期 2005.12.16
申请人 发明人
分类号 C03B20/00;C03C3/06;G03F1/22;G03F1/24;H01L21/027 主分类号 C03B20/00
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