发明名称 |
Multi-stage optical homogenization |
摘要 |
<p>Substrate processing equipment and methods are used to improve the uniformity of illumination across an illuminated portion of a substrate by processing light with multiple optical homogenizers. The multiple optical homogenizers each include micro-lens arrays (310, 312, 320, 322) and Fourier lens (314, 324). The multiple optical homogenizers are arranged so that the output numerical aperture of one of the optical homogenizers is within 5% of the input numerical aperture of another optical homogenizer.</p> |
申请公布号 |
EP2244279(A2) |
申请公布日期 |
2010.10.27 |
申请号 |
EP20100160623 |
申请日期 |
2010.04.21 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
JENNINGS, DEAN C.;THOMAS, TIMOTHY N.;HOWELLS, SAMUEL C.;ADAMS, BRUCE E.;LI, JIPING |
分类号 |
H01L21/00;B23K26/06;B23K26/073;H01L21/268 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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