| 发明名称 |
Micromachined structure and method of making such a structure |
| 摘要 |
<p>A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.</p> |
| 申请公布号 |
GB201015588(D0) |
申请公布日期 |
2010.10.27 |
| 申请号 |
GB20100015588 |
申请日期 |
2010.09.17 |
| 申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD |
发明人 |
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| 分类号 |
H01L41/22 |
主分类号 |
H01L41/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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