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经营范围
发明名称
Radio frequency glow discharge plasma sputtering
摘要
申请公布号
GB2469666(A)
申请公布日期
2010.10.27
申请号
GB20090006935
申请日期
2009.04.23
申请人
SHEFFIELD HALLAM UNIVERSITY
发明人
KEN YUKIMURA;PAPKEN HOVSEPIAN;ARUTIUN EHIASARIAN
分类号
H01J37/34;C23C14/34
主分类号
H01J37/34
代理机构
代理人
主权项
地址
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