发明名称 |
System, method, and apparatus for monitoring characteristics of RF power |
摘要 |
A system and method for monitoring RF power is described. In one embodiment the system samples RF power that is generated by an RF generator to obtain RF signals that include information indicative of electrical characteristics at a plurality of particular frequencies that fall within a frequency range. The RF signals are digitized to obtain a stream of digital RF signals that include information indicative of electrical characteristics at the plurality of particular frequencies, and the information indicative of electrical characteristics is successively transformed, for each of the plurality of particular frequencies, from a time domain into a frequency domain.
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申请公布号 |
US7822565(B2) |
申请公布日期 |
2010.10.26 |
申请号 |
US20070968081 |
申请日期 |
2007.12.31 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
BROUK VICTOR;ROBERG JEFF |
分类号 |
G01R11/00 |
主分类号 |
G01R11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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