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发明名称
HEAT TREATMENT FURNACE
摘要
申请公布号
KR100989960(B1)
申请公布日期
2010.10.26
申请号
KR20040019314
申请日期
2004.03.22
申请人
发明人
分类号
G02F1/13;H01L21/22;H01L21/31;H01L21/324
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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