发明名称 Semiconductor device and method of fabricating same
摘要 There is disclosed a semiconductor device having an MOS gate for reducing variations in threshold voltage (Vth) with time wherein a surface protective film is not formed in a device area including channels but only in a device peripheral area, thereby reducing the amount of hydrogen atoms migrating to a silicon-silicon oxide interface in a cell area and, accordingly, reducing the number of Si—H chemical bonds at the interface.
申请公布号 USRE41866(E1) 申请公布日期 2010.10.26
申请号 US20010891925 申请日期 2001.06.27
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YANO MITSUHIRO;MOCHIZUKI KOUICHI
分类号 H01L29/74;H01L21/336;H01L23/31;H01L29/06;H01L29/40;H01L29/423;H01L29/739;H01L29/76;H01L29/78;H01L31/111 主分类号 H01L29/74
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