WAFER TRANSFERRING ROBOT ARM

摘要

PURPOSE: A wafer transferring robot-arm is provided to minimize impacts applied to a wafer by supporting the wafer while the wafer is loaded on a robot-arm. CONSTITUTION: A wafer transferring robot-arm includes a loading stand(110), a block(120), and a guiding unit(130). The loading stand is expanded from one end of the robot-arm, and a wafer is loaded on the loading stand. The block is installed on one upper side of the loading stand and is curved into the same shape as the external edge of the wafer. The guiding unit is installed on the curved position of the block and supports the wafer. The wafer is arranged on the loading stand by the guiding unit.