发明名称 |
Method of manufacturing a magnetic head with integration of a small flash field, zero bias, and non-reactive ion milling for pole tip uniformity |
摘要 |
A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
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申请公布号 |
US7818875(B2) |
申请公布日期 |
2010.10.26 |
申请号 |
US20050297228 |
申请日期 |
2005.12.07 |
申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. |
发明人 |
BALAMAME HAMID;BEDELL DANIEL WAYNE;GUTBERLET MARY KATHRYN;HSIEH CLARENCE KAI-SHENG;PENTEK ARON;ZHENG YI |
分类号 |
G11B5/187 |
主分类号 |
G11B5/187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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