发明名称 Retainer ring and polishing machine
摘要 To provide a retainer ring by which an object to be polished can be uniformly polished, and deterioration thereof can be suppressed, and it does not take time to recycle, and a polishing machine having the retainer ring. The retainer ring 1 includes: a first annular portion 11 for surrounding an outer circumferential portion of the object to be polished and made of resin; and a second annular portion 12 provided on the first annular portion 11 and having a mechanical strength higher than that of the first annular portion 11. In rim portions of the first annular portion 11 and the second annular portion 12, a fixing portion 13 for fixing the first annular portion 11 and the second annular portion 12 with mechanical joining is provided. The first annular portion 11 protrudes beyond the fixing portion 13 toward the opposite side of the second annular portion 12.
申请公布号 US7819723(B2) 申请公布日期 2010.10.26
申请号 US20080053640 申请日期 2008.03.24
申请人 NEC ELECTRONICS CORPORATION 发明人 NAKAMURA YASUHIKO
分类号 B24B7/22;B24B37/04;B24B37/30;H01L21/304 主分类号 B24B7/22
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