MANUFACTURING DEVICE AND METHOD OF FLAT TYPE HEAT SPREADER AND A HEAT SPREADER OBTAINED BY THE SAME

摘要

PURPOSE: A heat spreader, a manufacturing device thereof, and a manufacturing method thereof are provided to cool a semiconductor device or electronic device by using latent heat according to phase change of heating mediums injected into a channel. CONSTITUTION: A pump unit(110) includes a hydraulic pump(111), a vacuum pump(112), and a booster pump(113). The pump unit is prepared inside a casing(210). A controller(211) and a heating medium storage tank(120) are prepared on the upper side of the casing. A finger unit(150) is comprised of a finger base, a finger block, and a fingering first cylinder. A finger lifting unit is comprised of a lifting cylinder to vertically lift the finger unit.