METHOD FOR MANUFACTURING SILICON NITRIDE FILTER, AND SILICON NITRIDE FILTER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a silicon nitride filter allowing a firing reaction in a shorter time and even at a lower temperature, and to provide a silicon nitride filter.

SOLUTION: This method of manufacturing the silicon nitride filter is such that: a raw material containing silicon as a main component and a raw material containing a pore forming agent are mixed according to a predetermined formulation and molded; and thereafter, the molded article is reaction-sintered in nitrogen atmosphere, where a zirconium-containing raw material is mixed in the material and a first stage firing in nitrogen atmosphere is performed for the nitriding reaction and a second stage firing is performed at a temperature higher than that in the first stage firing for sintering reaction.

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