| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid crystal device for controlling the pre-tilt angle of a crystal molecule to a desired value, improving a deposition rate, miniaturization a manufacturing apparatus, and forming an alignment layer with high dampproof property. SOLUTION: The method includes: a process using a sputter apparatus 3 having a pair of targets 5a, 5b facing each other via a plasma generation region, obliquely emitting an orientational film material 5p comprising an inorganic material from the targets 5a, 5b to a substrate W as a workpiece, and forming an inorganic orientational layer on the substrate W which has a plurality of columnar structures with crystals obliquely grown to the normal direction Z of the substrate W; and a process for treating the surface of the inorganic orientational layer by a silane-coupling agent having an alkyl group as a functional group, and forming an organic orientational layer on the inorganic orientation layer which has a monomolecular film of an organic material chemically bound to the inorganic orientation layer. A surface treatment selects the silane-coupling agent based on the carbon atom number, and configures the pre-tilt angle of the crystal molecule to the desired value. COPYRIGHT: (C)2011,JPO&INPIT
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