| 摘要 |
PROBLEM TO BE SOLVED: To reduce the local influence of temperature distribution, and to improve relative accuracy in a minute resistance array and an integrated circuit which uses the array. SOLUTION: The resistance array includes a plurality of resistance elements 103, formed on a semiconductor substrate 101 having an element isolating film 102. Each resistance element 103 is provided, with a resistance part formed of a polycrystalline body comprising at least silicon and a contact part 104 comprising a silicide layer. At least a part of each resistive element 103 is arranged on the semiconductor substrate 101 via an insulating film 301, having a film thickness smaller than that of the element isolating film 102. COPYRIGHT: (C)2011,JPO&INPIT
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