| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus with a relatively simplified constitution, avoiding electromagnetic field probe from colliding with an object to be measured, preventing the electromagnetic field probe and the to-be-measured object from being damaged, and detecting an electromagnetic noise without fail. SOLUTION: The electromagnet field probe 11 is used and has an electromagnetic noise inlet at a tip, and a plurality of light receiving sections A-D disposed at the tip. An illumination section 12 is provided so as to be separated from the electromagnet field probe 11 and has the object to be measured 10 irradiated with a light by the illumination section 12. The light-receiving sections A-D receive a reflection light from the object 10. Facing state of the object 10 relative to the light-receiving sections A-D is determined, based on the strengths of the reflection light received by the light-receiving sections A-D. COPYRIGHT: (C)2011,JPO&INPIT
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