| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting device, capable of using a line sensor and detecting surface defects of an object to be inspected, with high accuracy. SOLUTION: The surface inspecting device includes a conveyer 14 for conveying an object 12 to be inspected, an irradiating section 16 for irradiating to the surface of the object 12 conveyed by the conveyer 14 with a predetermined repeated light and darkness pattern; a power transmitting mechanism 18 for moving the light and darkness pattern irradiated to the object 12 in the width direction of the object 12; a line sensor 20 for imaging a section with the light and darkness pattern of the object 12 irradiated; and a defect determining section 50 for determining the presence of defects on the surface of the object 12, based on the signal imaged by the line sensor 20. COPYRIGHT: (C)2011,JPO&INPIT
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