| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a recycled resist, capable of recycling a resist regardless of difference in component between a solvent of the resist and a rinsing liquid. <P>SOLUTION: The method of manufacturing the recycled resist from a used resist by recovering a remaining used resist after applying a fresh resist in the application step S10 employs a propylene glycol monomethyl ether acetate (PGMEA) mainly as a solvent of the fresh resist and includes: the rinsing step S20 of obtaining the used resist by adding a rinsing liquid containing another solvent having a lower boiling point than the PGMEA, such as a PGME, to the fresh resist after application; and the fractional distillation step S40 of performing fractional distillation so that the another solvent has a prescribed concentration or lower, after the step S30 of recovering the used resist. <P>COPYRIGHT: (C)2011,JPO&INPIT |
