| 摘要 |
Disclosed is a pressure sensor, especially for measuring pressures exceeding 100 bar, with a diaphragm (1, 1′) that can be deflected and/or deformed as a result of pressurization. It has an enclosed hollow volume (6) that is disposed below the diaphragm and in particular is at least partly filled with a gas or a mixture of gas. A supporting frame (2) for the diaphragm sealingly closes the periphery of the diaphragm relative to a base member (3), and at least one pressure transducer converts the deflection and/or deformation of the diaphragm into at least one electric quantity. It uses a capacitive, piezoresistive or any other principle or at least one strain measuring strip, in which case the pressure sensor is sealingly encapsulated on all sides and has no electric contacts or lines leading to the outside.
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