发明名称 Film forming apparatus and method of forming film
摘要 Temperature adjustment means is provided to a chamber for accommodating a stage, a discharge head, and a maintenance device. The temperature adjustment means adjusts the temperature of the maintenance area at least while the transport device has the discharge head positioned in the maintenance area, so that the temperature is equal to or greater than the temperature of the drawing area while the transport device has the discharge head positioned in the drawing area.
申请公布号 US2010266777(A1) 申请公布日期 2010.10.21
申请号 US20100757633 申请日期 2010.04.09
申请人 SEIKO EPSON CORPORATION 发明人 KASUGA OSAMU
分类号 B05D1/02;B05C5/00 主分类号 B05D1/02
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