| 摘要 |
There is provided a database storing reference data including a plurality of reference image data, which are obtained by imaging reference substrates, respectively, wherein each of the reference substrates lacks only one of the films of different kinds but includes remainder of the films of different kinds, and wherein in the reference substrates the lacking films are different from each other, and wherein the plurality of reference image data is classified into categories according to the kinds of the films. Difference degrees between color information of a defect area extracted from an image data of an inspection target substrate and color information of corresponding areas of the reference substrates are calculated. Based on the difference degree, the defective film is identified.
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