| 摘要 |
PROBLEM TO BE SOLVED: To safely open a door without newly providing a complicated mechanism. SOLUTION: A pressure vessel 1 includes a processing tank 2 receiving an object to be processed and the sealing door 3 closing the processing tank 2, and performs a predetermined process under pressure exceeding the atmospheric pressure or pressure lower than the atmospheric pressure. The pressure vessel includes a vacuum pump 4 forming a pressure reducing means reducing pressure in the processing tank 2, a sterile air valve 5 forming a pressure restoring means restoring pressure in the processing tank 2, and a control section 6 controlling opening operation of the sealing door 3. The control section 6 performs door opening control for operating the pressure reducing means 4 while operation of the device is stopped, restoring the pressure in the processing tank 2 by the pressure restoring means 5 when detecting fulfillment of either one of conditions that the pressure in the processing tank 2 is reduced to a predetermined pressure and the pressure reducing means 4 operates for a predetermined time, and allowing the opening operation of the sealing door 3 after making an atmospheric pressure state in the processing tank 2. COPYRIGHT: (C)2011,JPO&INPIT
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