| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator that reduces the profile of equipment and expands a movement stroke through a simple structure, and also is superior in the straightness of movement and the orthogonality of X and Y directions, and to provide a positioning device using this actuator. <P>SOLUTION: A periodical structure is formed in fixed members 36 in sliding contact with magnets 31, 32 and this periodical structure is made identical with respect to two orthogonal axes. Attractive force exerted between the magnets 31, 32 and the fixed members 36 is thereby provided with regularity along the two axes X and Y so that straight movement in two orthogonal directions X and Y is enabled. <P>COPYRIGHT: (C)2011,JPO&INPIT |
