| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent patterns which are aligned with each other on both sides of a glass substrate, from being displaced due to heat shrinkage of the glass substrate when formed. <P>SOLUTION: Negative patterns obtained by inverting positive patterns to be formed finally are formed in alignment on both sides of the glass substrate at a temperature lower than the temperature at which the glass substrate shrinks. On each side of the glass substrate, a material for the positive patterns are deposited at a temperature higher than the temperature at which the glass substrate shrinks so as to cover the negative patterns. The negative patterns are peeled to form the aligned positive patterns on each side of the glass substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT |
