METHOD FOR PURIFYING SILANE

摘要

The present invention relates to a method for purifying silane. According to the method of the present invention, ultra high purity target compounds in which impurities, in particular impurities such as ethylene, ethyl silane, or the like are completely removed, can be obtained. In addition, the method of the present invention eliminates the necessity of additional processes such as an adsorbent regeneration process, to thereby improve energy utilization efficiency and to enable a silane purification process to be performed in a stable and continuous manner under mild conditions of low pressure. Further, the present invention provides a purification method which does not have a negative impact on the quality of the final purified silane even upon the occurrence of a variance in the processing conditions.