| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning unit and an ultrasonic cleaning device which can suppress an amount of use of a cleaning liquid without damaging a cleaning substance. SOLUTION: This ultrasonic cleaning unit 20 includes an ultrasonic transfer means 25 disposed so as to oppose a cleaning face Sa of a cleaning substance S with a gap, an ultrasonic vibrator 23 provided in the ultrasonic transfer means 25 for applying ultrasonic waves to a cleaning liquid L on the cleaning face Sa via the ultrasonic transfer means 25, and a liquid guiding means 40 which has a flow path 40a in which the cleaning liquid L circulates in an outer peripheral side face of the ultrasonic transfer means 25 to surround it, and which is arranged to be closer to the cleaning face Sa than the ultrasonic transfer means 25 for discharging the cleaning liquid L to the gap. This ultrasonic cleaning unit 20 can maintain the cleaning liquid L between the ultrasonic transfer means 25 and the cleaning substance S, and can carry out ultrasonic cleaning efficiently with a small amount of cleaning liquid without damaging the cleaning substance. COPYRIGHT: (C)2011,JPO&INPIT
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