发明名称 METHOD OF DOPING AND APPARATUS FOR DOPING
摘要 A method of doping at least one element in an array of elements on a substrate is disclosed. The method comprises providing at least one microfluidic channel passing from a first location external of the at least one element to a second location in fluidic communication with the at least one element. A dopant fluid is passed through the at least one microfluidic channel to the at least one element for doping the at least one element. A corresponding apparatus is also disclosed.
申请公布号 US2010266768(A1) 申请公布日期 2010.10.21
申请号 US20080734996 申请日期 2008.08.27
申请人 发明人 ZURUZI ABU SAMAH
分类号 B05D5/00;B05C3/20;B05C11/00;B05D1/32 主分类号 B05D5/00
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