| 发明名称 |
FLATNESS CORRECTION JIG, METHOD AND DEVICE FOR CORRECTING FLATNESS OF FLAT PLATE MEMBER, AND POLISHING DEVICE |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flatness correction jig quickly improving flatness even if a flat plate member has a thin thickness lacking rigidity. <P>SOLUTION: The flatness correction jig 60 includes a disk 61 placed on the flat plate member 10 arranged on a lapping machine and polished. A resin film 62 is stuck to a surface of the disk 61 facing the flat plate member 10. <P>COPYRIGHT: (C)2011,JPO&INPIT |
| 申请公布号 |
JP2010234448(A) |
申请公布日期 |
2010.10.21 |
| 申请号 |
JP20090082041 |
申请日期 |
2009.03.30 |
| 申请人 |
TOPCON CORP |
发明人 |
KUROSAWA HIROSHI |
| 分类号 |
B24B37/04;B24B37/10;B24B37/30 |
主分类号 |
B24B37/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
