| 发明名称 |
METHOD FOR MANUFACTURING SUPPORT FRAME FOR PELLICLE, SUPPORT FRAME FOR PELLICLE, AND PELLICLE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing support frame for a pellicle which prevents occurrence of haze even under irradiation with high energy light as much as possible by reducing a content of inorganic acids, and a support frame for a pellicle, which is obtained by this method. <P>SOLUTION: In the method for manufacturing a support frame for a pellicle which is formed with an aluminum material including aluminum or an aluminum alloy and includes an optical thin film body, an anodic oxidation film is formed on a surface of the aluminum material by anodic oxidation processing using an alkaline aqueous solution containing a tartaric acid, and the anodic oxidation film is subjected to dyeing processing using an organic dye and then is subjected to sealing processing by steam to obtain a support frame for the pellicle. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
| 申请公布号 |
JP2010237282(A) |
申请公布日期 |
2010.10.21 |
| 申请号 |
JP20090082579 |
申请日期 |
2009.03.30 |
| 申请人 |
NIPPON LIGHT METAL CO LTD |
发明人 |
TAGUCHI YOSHIHIRO;YAMAGUCHI TAKAYUKI |
| 分类号 |
B65D85/86;G03F1/62;G03F1/64 |
主分类号 |
B65D85/86 |
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