SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing apparatus having a connecting member interlinked a plurality of supporting members is provided to realize the substrate processing apparatus while maintaining the thermion on the substrate. CONSTITUTION: A plate member is horizontally arranged on a surface. The plate member enforces the thermal process for the substrate. The predetermined external diameter for mounting the substrate in which a plurality of wires(54) is arranged in the surface of the plate member is had. The apparatus for adjusting tension regularly supports the tension of a plurality of wires.