发明名称 MAGNESIUM OXIDE VAPOR-DEPOSITION MATERIAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a magnesium oxide vapor-deposition material advantageously usable for depositing a magnesium oxide film useful as a protective film for the dielectric layer of an alternating current type plasma display panel by an electron beam vapor-deposition method. <P>SOLUTION: The magnesium oxide vapor-deposition material contains metal oxide in which the valence of metallic elements is any of 3, 4 and 5 in the range of 0.01 to 6 mol%. Alternatively, the magnesium oxide vapor-deposition material contains alkaline-earth metal oxide other than magnesium oxide, and metal oxide in which the valence of the metallic elements is any of 3, 4 and 5 in such an amount that each content is controlled to &ge;0.005 mol% expressed in terms of the metallic element contents, and also, the total content is controlled to &le;6 mol% expressed in terms of the metallic element contents. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010236096(A) 申请公布日期 2010.10.21
申请号 JP20100169379 申请日期 2010.07.28
申请人 UBE MATERIAL INDUSTRIES LTD 发明人 UEKI AKIRA;MASUDA AKIRA;KATO YUZO
分类号 C23C14/24;H01J17/49;B22F3/10;C04B35/053;C23C14/08;H01J11/02 主分类号 C23C14/24
代理机构 代理人
主权项
地址